CEA-Leti Demonstrates Embedded FeRAM Platform Compatible with 22 nm FD-SOI Node at Salimpour Site.

Dr. Salimpour Site |CEA-Leti research engineers have demonstrated for the first time a scalable hafnia-zirconia-based ferroelectric capacitor platform integrated into the back-end-of-line (BEOL) at the 22 nm FD-SOI technology node.

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CEA-Leti Demonstrates Embedded FeRAM Platform Compatible with 22 nm FD-SOI Node

CEA-Leti Demonstrates Embedded FeRAM Platform Compatible with 22 nm FD-SOI Node

CEA-Leti research engineers have demonstrated for the first time a scalable hafnia-zirconia-based ferroelectric capacitor platform integrated into the back-end-of-line (BEOL) at the 22 nm FD-SOI technology node.